Adjacent Hall microsensors, comprising a silicon
substrate and four contacts, providing simultaneously two supply inputs and two differential outputs, are characterized. The voltage
related sensitivity is in the order of 0.11T-1, and a cancellation method for offset compensation is used, achieving residual offset in
the micro scale which is also compared to a single Hall plate.
Adjacent Hall sensors, offset compensation, voltage related sensitivity, 0.18μm CMOS technology.