Open Science Research Excellence

ICMN 2021 : International Conference on Microelectronics and Nanotechnology

Tokyo, Japan
January 7 - 8, 2021

Call for Papers

ICMN 2021 : International Conference on Microelectronics and Nanotechnology is the premier interdisciplinary platform for the presentation of new advances and research results in the fields of Microelectronics and Nanotechnology. The conference will bring together leading academic scientists, researchers and scholars in the domain of interest from around the world. Topics of interest for submission include, but are not limited to:
  • Microelectronic Device Processing and Process Integration
  • Microelectronic Device Electrical and Reliability Testing
  • Semiconductor Packaging and Reliability
  • Microelectronic Circuit Design
  • MEMS and Nanoelectronic Devices
  • DUV, immersion, EUV and X-ray lithography
  • Electron and ion beam lithography
  • Sub-half wavelength "super resolution" optical lithography
  • Photon- and charged-particle optics
  • Metrology and alignment
  • Resists and resist processing
  • Plasma etching and deposition
  • Nano-fabrication techniques
  • Maskless Lithography
  • Nanoelectronics
  • Nanomagnetic devices
  • Novel ultrahigh density data storage devices
  • Nanoparticle synthesis and assembly
  • Nanofabrication for energy sources
  • Atomic and Molecular manipulation
  • Optical tweezers
  • Simulation and computer aided design for the Nanoscale Era
  • Nanometer scale photonic devices
  • Molecular and low-dimensional nano-electronics
  • Bio-nanotechnology & hybrid bio/solid state devices
  • Micro and nano-scaled MEMS
  • Nano-particle, synthesis and assembly
  • Self-assembly and directed self-assembly
  • Nanoimprint lithography, embossing and soft lithography
  • Nanofabrication for energy sources
  • Lithography and Related Technologies
  • DUV, VUV, EUV Lithography and Metrology
  • Electron and Ion Beam Lithography
  • Resist Materials and Processing
  • Nanotechnology
  • Nanodevices
  • Nanofabrication
  • Nanomaterials
  • Nano-Tools
  • Nanoimprint, Nanoprint and Rising Lithography
  • Bio MEMS, Lab on a Chip
  • Microsystem Technology and MEMS